Fabrication of Sputtered Gated Silicon Field Emitter Arrays with Low Gate Leakage Currents by Using Si Dry Etch
소개글Author: Cho Eou Sik, Kwon Sang Jik
Organization: Cho Eou Sik; Kwon Sang Jik
Publish: Transactions on Electrical and Electronic Materials Volume 14, Issue1, p28~31, 25 Feb 2013
