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The Dry Etching of TiN Thin Films Using Inductively Coupled CF4 Ar Plasma

소개글 Author: Woo Jong-Chang, Choi Chang-Auck, Joo Young-Hee, Kim Han-Soo, Kim Chang-Il Organization: Woo Jong-Chang; Choi Chang-Auck; Joo Young-Hee; Kim Han-Soo; Kim Chang-Il Publish: Transactions on Electrical and Electronic Materials Volume 14, Issue2, p67~70, 25 Apr 2013
태그
  • Etching
  • TiN
  • XPS
  • ICP
  • CF4