Nitrogen Incorporation of Nanostructured Amorphous Carbon Thin Films by Aerosol-Assisted Chemical Vapor Deposition
소개글Author: Fadzilah A. N., Dayana K., Rusop M.
Organization: Fadzilah A. N.; Dayana K.; Rusop M.
Publish: Transactions on Electrical and Electronic Materials Volume 14, Issue4, p165~171, 25 Aug 2013
태그
Nanostructured
Aerosol-assisted CVD
Atomic force microscope (AFM)
Field emission scanning electron microscope (FESEM)
