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Stress Analysis Using Finite Element Modeling of a Novel RF Microelectromechanical System Shunt Switch Designed on Quartz Substrate

소개글 Author: Singh Tejinder, Khaira Navjot K., Sengar Jitendra S. Organization: Singh Tejinder; Khaira Navjot K.; Sengar Jitendra S. Publish: Transactions on Electrical and Electronic Materials Volume 14, Issue5, p225~230, 25 Oct 2013
태그
  • RF MEMS
  • RF shunt switch
  • Capacitive MEMS
  • Low-voltage MEMS switch
  • Quartz substrate