Reflectivity Control at Substrate Photoresist Interface by Inorganic Bottom Anti-Reflection Coating for Nanometer-scaled Devices
소개글Author: Kim Sang-Yong, Kim Yong-Sik
Organization: Kim Sang-Yong; Kim Yong-Sik
Publish: Transactions on Electrical and Electronic Materials Volume 15, Issue3, p159~163, 25 June 2014
