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Fabrication of Metal-insulator-metal Capacitors with SiNx Thin Films Deposited by Plasma-enhanced Chemical Vapor Deposition

소개글 Author: Wang Cong, Kim Nam-Young Organization: Wang Cong; Kim Nam-Young Publish: Transactions on Electrical and Electronic Materials Volume 10, Issue5, p147~151, 31 Oct 2009
태그
  • IPD
  • MIM capacitor
  • PECVD
  • Breakdown electric field
  • Silicon nitride