Speckle Defect by Dark Leakage Current in Nitride Stringer at the Edge of Shallow Trench Isolation for CMOS Image Sensors
소개글Author: Jeong Woo-Yang, Yi Keun-Man
Organization: Jeong Woo-Yang; Yi Keun-Man
Publish: Transactions on Electrical and Electronic Materials Volume 10, Issue6, p189~192, 31 Dec 2009