The Electrical and Optical Properties of Al-Doped ZnO Films Sputtered in an Ar_H2 Gas Radio Frequency Magnetron Sputtering System

소개글 Author: Hwang Seung-Taek, Park Choon-Bae Organization: Hwang Seung-Taek; Park Choon-Bae Publish: Transactions on Electrical and Electronic Materials Volume 11, Issue2, p81~84, 25 Apr 2010