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Structural and Dielectric Properties of Pb[(Zr,Sn)Ti]NbO3 Thin Films Deposited by Radio Frequency Magnetron Sputtering

소개글 Author: Choi Woo-Chang Organization: Choi Woo-Chang Publish: Transactions on Electrical and Electronic Materials Volume 11, Issue4, p182~185, 25 Aug 2010
태그
  • Ferroelectric
  • PZT
  • Doping
  • Sputtering
  • Rapid thermal annealing