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Damage on the Surface of Zinc Oxide Thin Films Etched in Cl-based Gas Chemistry

소개글 Author: Woo Jong-Chang, Ha Tae-Kyung, Li Chen, Kim Seung-Han, Park Jung-Soo, Heo Kyung-Mu, Kim Chang-Il Organization: Woo Jong-Chang; Ha Tae-Kyung; Li Chen; Kim Seung-Han; Park Jung-Soo; Heo Kyung-Mu; Kim Chang-Il Publish: Transactions on Electrical and Electronic Materials Volume 12, Issue2, p51~55, 25 Apr 2011
태그
  • Etch
  • Inductively coupled plasma
  • Zinc oxide
  • Cl2
  • O2