Characteristic of Al-In-Sn-ZnO Thin Film Prepared by FTS System with Hetero Targets
소개글Author: Hong Jeong Soo, Kim Kyung Hwan
Organization: Hong Jeong Soo; Kim Kyung Hwan
Publish: Transactions on Electrical and Electronic Materials Volume 12, Issue2, p76~79, 25 Apr 2011