Emission Properties from Induced Structural Degradation of a-CH Thin Film

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Emission Properties from Induced Structural Degradation of a-CH Thin Film

소개글 Author: Yoo Young-Zo, Song Jeong-Hwan Organization: Yoo Young-Zo; Song Jeong-Hwan Publish: Transactions on Electrical and Electronic Materials Volume 12, Issue3, p89~92, 25 June 2011

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a-C:H film
Plasma enhanced chemical vapor deposition
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Thermal energy
Dehydrogenation

저작시기 2011-06월

등록일 2016-07-14

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