Dry Etching Characteristics of TiN Thin Films in BCl3-Based Plasma
소개글Author: Woo, Jong-Chang, Park, Jung-Soo, Kim Chang-Il
Organization: Woo, Jong-Chang; Park, Jung-Soo; Kim Chang-Il
Publish: Transactions on Electrical and Electronic Materials Volume 12, Issue3, p106~109, 25 June 2011