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Dry Etching Characteristics of TiN Thin Films in BCl3-Based Plasma

소개글 Author: Woo, Jong-Chang, Park, Jung-Soo, Kim Chang-Il Organization: Woo, Jong-Chang; Park, Jung-Soo; Kim Chang-Il Publish: Transactions on Electrical and Electronic Materials Volume 12, Issue3, p106~109, 25 June 2011
태그
  • Titanium nitride
  • BCl3/Ar
  • Inductively coupled plasma
  • Etch
  • X-ray photoelectron spectroscopy