Study of Via-Typed Air-Gap for Logic Devices Applications below 45 nm Node
소개글Author: Kim Sang-Yong, Kim Il-Soo, Jeong Woo-Yang
Organization: Kim Sang-Yong; Kim Il-Soo; Jeong Woo-Yang
Publish: Transactions on Electrical and Electronic Materials Volume 12, Issue4, p131~134, 25 Aug 2011