카테고리
전체 > 전체

Dry Etching of ITO Thin Films by the Addition of Gases in Cl2 BCl3 Inductivity Coupled Plasma

소개글 Author: Joo Young-Hee, Woo Jong-Chang, Choi Kyung-Rok, Kim Han-Soo, Wi Jae-Hyung, Kim Chang-Il Organization: Joo Young-Hee; Woo Jong-Chang; Choi Kyung-Rok; Kim Han-Soo; Wi Jae-Hyung; Kim Chang-Il Publish: Transactions on Electrical and Electronic Materials Volume 13, Issue3, p157~161, 25 June 2012
태그
  • ITO
  • Cl2/BCl3
  • Inert gas
  • N2
  • XPS
  • AFM