Effect of Alcohols on the Dry Etching of Sacrificial SiO2 in Supercritical CO2
소개글Author: Kim Do Hoon, Jang Myoung Jae, Lim Kwon Taek
Organization: Kim Do Hoon; Jang Myoung Jae; Lim Kwon Taek
Publish: Clean Technology Volume 18, Issue3, p280~286, 30 Sep 2012
